Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory
- Authors: Tolmachev A.I.1, Forlano L.2
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Affiliations:
- Russian New University
- Universita della Calabria
- Issue: Vol 63, No 10 (2018)
- Pages: 1455-1458
- Section: Theoretical and Mathematical Physics
- URL: https://journals.rcsi.science/1063-7842/article/view/202117
- DOI: https://doi.org/10.1134/S1063784218100225
- ID: 202117
Cite item
Abstract
We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.
About the authors
A. I. Tolmachev
Russian New University
Author for correspondence.
Email: tolmachev.alex@rambler.ru
Russian Federation, Moscow, 105505
L. Forlano
Universita della Calabria
Author for correspondence.
Email: forlano@vegachess.com
Italy, Cozenza, 87036