Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory
- 作者: Tolmachev A.1, Forlano L.2
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隶属关系:
- Russian New University
- Universita della Calabria
- 期: 卷 63, 编号 10 (2018)
- 页面: 1455-1458
- 栏目: Theoretical and Mathematical Physics
- URL: https://journals.rcsi.science/1063-7842/article/view/202117
- DOI: https://doi.org/10.1134/S1063784218100225
- ID: 202117
如何引用文章
详细
We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.
作者简介
A. Tolmachev
Russian New University
编辑信件的主要联系方式.
Email: tolmachev.alex@rambler.ru
俄罗斯联邦, Moscow, 105505
L. Forlano
Universita della Calabria
编辑信件的主要联系方式.
Email: forlano@vegachess.com
意大利, Cozenza, 87036