Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory
- Авторлар: Tolmachev A.1, Forlano L.2
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Мекемелер:
- Russian New University
- Universita della Calabria
- Шығарылым: Том 63, № 10 (2018)
- Беттер: 1455-1458
- Бөлім: Theoretical and Mathematical Physics
- URL: https://journals.rcsi.science/1063-7842/article/view/202117
- DOI: https://doi.org/10.1134/S1063784218100225
- ID: 202117
Дәйексөз келтіру
Аннотация
We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.
Авторлар туралы
A. Tolmachev
Russian New University
Хат алмасуға жауапты Автор.
Email: tolmachev.alex@rambler.ru
Ресей, Moscow, 105505
L. Forlano
Universita della Calabria
Хат алмасуға жауапты Автор.
Email: forlano@vegachess.com
Италия, Cozenza, 87036