Email this article Combined Technology Fabrication of Spin-Valve Magnetoresistive Elements and Micromagnets
- Authors: Amelichev V.V.1,2, Belyakov P.A.1,2, Kostyuk D.V.1,2, Vasil’ev D.V.1,2, Orlov E.P.1,2, Kazakov Y.V.2, Kasatkin S.I.3, Krikunov A.I.4
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Affiliations:
- LLC Scientific-Production Enterprise “Technology,”
- Research and Production Complex “Technological Center” MIET
- Trapeznikov Institute of Control Sciences
- LLC Research and Production Complex “Fotron-Avto,”
- Issue: Vol 63, No 6 (2018)
- Pages: 848-850
- Section: Solid State Electronics
- URL: https://journals.rcsi.science/1063-7842/article/view/201515
- DOI: https://doi.org/10.1134/S1063784218060038
- ID: 201515
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Abstract
We present the research results of the fabrication technology of magnetoresistive (MR) elements based on the multilayer spin-valve magnetoresistive (SVMR) Ta–FeNiCo–CoFe–Cu–CoFe–FeNiCo–FeMn–Та nanostructures and CoNi micromagnets for the construction of digital galvanic interchanges and the magnetic field sensors. The results of experimental studies of test elements based on multilayer SVMR nanostructures with an MR effect from 7 to 8% and films of magnetically hard materials with a coercive force of up to 95 Oe formed on a single silicon die are presented.
About the authors
V. V. Amelichev
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Author for correspondence.
Email: goodnessgims@mail.ru
Russian Federation, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
P. A. Belyakov
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Russian Federation, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
D. V. Kostyuk
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Russian Federation, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
D. V. Vasil’ev
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Russian Federation, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
E. P. Orlov
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Russian Federation, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
Yu. V. Kazakov
Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
S. I. Kasatkin
Trapeznikov Institute of Control Sciences
Email: goodnessgims@mail.ru
Russian Federation, Moscow, 117997
A. I. Krikunov
LLC Research and Production Complex “Fotron-Avto,”
Email: goodnessgims@mail.ru
Russian Federation, Moscow, 117105
