Combined Technology Fabrication of Spin-Valve Magnetoresistive Elements and Micromagnets
- Авторлар: Amelichev V.1,2, Belyakov P.1,2, Kostyuk D.1,2, Vasil’ev D.1,2, Orlov E.1,2, Kazakov Y.2, Kasatkin S.3, Krikunov A.4
-
Мекемелер:
- LLC Scientific-Production Enterprise “Technology,”
- Research and Production Complex “Technological Center” MIET
- Trapeznikov Institute of Control Sciences
- LLC Research and Production Complex “Fotron-Avto,”
- Шығарылым: Том 63, № 6 (2018)
- Беттер: 848-850
- Бөлім: Solid State Electronics
- URL: https://journals.rcsi.science/1063-7842/article/view/201515
- DOI: https://doi.org/10.1134/S1063784218060038
- ID: 201515
Дәйексөз келтіру
Аннотация
We present the research results of the fabrication technology of magnetoresistive (MR) elements based on the multilayer spin-valve magnetoresistive (SVMR) Ta–FeNiCo–CoFe–Cu–CoFe–FeNiCo–FeMn–Та nanostructures and CoNi micromagnets for the construction of digital galvanic interchanges and the magnetic field sensors. The results of experimental studies of test elements based on multilayer SVMR nanostructures with an MR effect from 7 to 8% and films of magnetically hard materials with a coercive force of up to 95 Oe formed on a single silicon die are presented.
Авторлар туралы
V. Amelichev
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Хат алмасуға жауапты Автор.
Email: goodnessgims@mail.ru
Ресей, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
P. Belyakov
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Ресей, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
D. Kostyuk
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Ресей, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
D. Vasil’ev
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Ресей, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
E. Orlov
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Ресей, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
Yu. Kazakov
Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Ресей, Zelenograd, Moscow, 124498
S. Kasatkin
Trapeznikov Institute of Control Sciences
Email: goodnessgims@mail.ru
Ресей, Moscow, 117997
A. Krikunov
LLC Research and Production Complex “Fotron-Avto,”
Email: goodnessgims@mail.ru
Ресей, Moscow, 117105