Combined Technology Fabrication of Spin-Valve Magnetoresistive Elements and Micromagnets
- Autores: Amelichev V.1,2, Belyakov P.1,2, Kostyuk D.1,2, Vasil’ev D.1,2, Orlov E.1,2, Kazakov Y.2, Kasatkin S.3, Krikunov A.4
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Afiliações:
- LLC Scientific-Production Enterprise “Technology,”
- Research and Production Complex “Technological Center” MIET
- Trapeznikov Institute of Control Sciences
- LLC Research and Production Complex “Fotron-Avto,”
- Edição: Volume 63, Nº 6 (2018)
- Páginas: 848-850
- Seção: Solid State Electronics
- URL: https://journals.rcsi.science/1063-7842/article/view/201515
- DOI: https://doi.org/10.1134/S1063784218060038
- ID: 201515
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Resumo
We present the research results of the fabrication technology of magnetoresistive (MR) elements based on the multilayer spin-valve magnetoresistive (SVMR) Ta–FeNiCo–CoFe–Cu–CoFe–FeNiCo–FeMn–Та nanostructures and CoNi micromagnets for the construction of digital galvanic interchanges and the magnetic field sensors. The results of experimental studies of test elements based on multilayer SVMR nanostructures with an MR effect from 7 to 8% and films of magnetically hard materials with a coercive force of up to 95 Oe formed on a single silicon die are presented.
Sobre autores
V. Amelichev
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Autor responsável pela correspondência
Email: goodnessgims@mail.ru
Rússia, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
P. Belyakov
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Rússia, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
D. Kostyuk
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Rússia, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
D. Vasil’ev
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Rússia, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
E. Orlov
LLC Scientific-Production Enterprise “Technology,”; Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Rússia, Zelenograd, Moscow, 124498; Zelenograd, Moscow, 124498
Yu. Kazakov
Research and Production Complex “Technological Center” MIET
Email: goodnessgims@mail.ru
Rússia, Zelenograd, Moscow, 124498
S. Kasatkin
Trapeznikov Institute of Control Sciences
Email: goodnessgims@mail.ru
Rússia, Moscow, 117997
A. Krikunov
LLC Research and Production Complex “Fotron-Avto,”
Email: goodnessgims@mail.ru
Rússia, Moscow, 117105