Study of Metal Atom Ionization in a Hollow-Cathode Magnetron
- 作者: Tsargorodtsev Y.1, Poluektov N.1, Usatov I.1, Evstigneev A.1, Kozlovskaya E.1, Amelkin O.1
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隶属关系:
- Bauman Moscow State Technical University, Mytishchi Branch
- 期: 卷 45, 编号 6 (2019)
- 页面: 592-601
- 栏目: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/187178
- DOI: https://doi.org/10.1134/S1063780X19050131
- ID: 187178
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详细
The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using an optical probe. The plasma parameters in the dc and pulsed discharges were determined by means of a Langmuir probe. The goal of this research was to find the position of the ionization region and reveal the mechanism of ionization of sputtered target atoms.
作者简介
Yu. Tsargorodtsev
Bauman Moscow State Technical University, Mytishchi Branch
编辑信件的主要联系方式.
Email: tsargor@yandex.ru
俄罗斯联邦, Mytishchi, Moscow oblast, 141005
N. Poluektov
Bauman Moscow State Technical University, Mytishchi Branch
编辑信件的主要联系方式.
Email: poluekt@mgul.ac.ru
俄罗斯联邦, Mytishchi, Moscow oblast, 141005
I. Usatov
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
俄罗斯联邦, Mytishchi, Moscow oblast, 141005
A. Evstigneev
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
俄罗斯联邦, Mytishchi, Moscow oblast, 141005
E. Kozlovskaya
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
俄罗斯联邦, Mytishchi, Moscow oblast, 141005
O. Amelkin
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
俄罗斯联邦, Mytishchi, Moscow oblast, 141005