Study of Metal Atom Ionization in a Hollow-Cathode Magnetron

Abstract

The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using an optical probe. The plasma parameters in the dc and pulsed discharges were determined by means of a Langmuir probe. The goal of this research was to find the position of the ionization region and reveal the mechanism of ionization of sputtered target atoms.