Study of Metal Atom Ionization in a Hollow-Cathode Magnetron
- Authors: Tsargorodtsev Y.P.1, Poluektov N.P.1, Usatov I.I.1, Evstigneev A.G.1, Kozlovskaya E.P.1, Amelkin O.O.1
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Affiliations:
- Bauman Moscow State Technical University, Mytishchi Branch
- Issue: Vol 45, No 6 (2019)
- Pages: 592-601
- Section: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/187178
- DOI: https://doi.org/10.1134/S1063780X19050131
- ID: 187178
Cite item
Abstract
The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using an optical probe. The plasma parameters in the dc and pulsed discharges were determined by means of a Langmuir probe. The goal of this research was to find the position of the ionization region and reveal the mechanism of ionization of sputtered target atoms.
About the authors
Yu. P. Tsargorodtsev
Bauman Moscow State Technical University, Mytishchi Branch
Author for correspondence.
Email: tsargor@yandex.ru
Russian Federation, Mytishchi, Moscow oblast, 141005
N. P. Poluektov
Bauman Moscow State Technical University, Mytishchi Branch
Author for correspondence.
Email: poluekt@mgul.ac.ru
Russian Federation, Mytishchi, Moscow oblast, 141005
I. I. Usatov
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Russian Federation, Mytishchi, Moscow oblast, 141005
A. G. Evstigneev
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Russian Federation, Mytishchi, Moscow oblast, 141005
E. P. Kozlovskaya
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Russian Federation, Mytishchi, Moscow oblast, 141005
O. O. Amelkin
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Russian Federation, Mytishchi, Moscow oblast, 141005