Study of Metal Atom Ionization in a Hollow-Cathode Magnetron
- Авторлар: Tsargorodtsev Y.1, Poluektov N.1, Usatov I.1, Evstigneev A.1, Kozlovskaya E.1, Amelkin O.1
-
Мекемелер:
- Bauman Moscow State Technical University, Mytishchi Branch
- Шығарылым: Том 45, № 6 (2019)
- Беттер: 592-601
- Бөлім: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/187178
- DOI: https://doi.org/10.1134/S1063780X19050131
- ID: 187178
Дәйексөз келтіру
Аннотация
The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using an optical probe. The plasma parameters in the dc and pulsed discharges were determined by means of a Langmuir probe. The goal of this research was to find the position of the ionization region and reveal the mechanism of ionization of sputtered target atoms.
Авторлар туралы
Yu. Tsargorodtsev
Bauman Moscow State Technical University, Mytishchi Branch
Хат алмасуға жауапты Автор.
Email: tsargor@yandex.ru
Ресей, Mytishchi, Moscow oblast, 141005
N. Poluektov
Bauman Moscow State Technical University, Mytishchi Branch
Хат алмасуға жауапты Автор.
Email: poluekt@mgul.ac.ru
Ресей, Mytishchi, Moscow oblast, 141005
I. Usatov
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Ресей, Mytishchi, Moscow oblast, 141005
A. Evstigneev
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Ресей, Mytishchi, Moscow oblast, 141005
E. Kozlovskaya
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Ресей, Mytishchi, Moscow oblast, 141005
O. Amelkin
Bauman Moscow State Technical University, Mytishchi Branch
Email: poluekt@mgul.ac.ru
Ресей, Mytishchi, Moscow oblast, 141005