Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2


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The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.

作者简介

S. Erenburg

Nikolaev Institute of Inorganic Chemistry, Siberian Branch; Institute of Nuclear Physics, Siberian Branch

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Email: simon@niic.nsc.ru
俄罗斯联邦, Novosibirsk, 630090; Novosibirsk, 630090

S. Trubina

Nikolaev Institute of Inorganic Chemistry, Siberian Branch

Email: simon@niic.nsc.ru
俄罗斯联邦, Novosibirsk, 630090

K. Kvashnina

ESRF; HZDR

Email: simon@niic.nsc.ru
法国, Grenoble, 38043; Dresden, 01314

V. Kruchinin

Rzhanov Institute of Semiconductor Physics, Siberian Branch

Email: simon@niic.nsc.ru
俄罗斯联邦, Novosibirsk, 630090

V. Gritsenko

Rzhanov Institute of Semiconductor Physics, Siberian Branch; Novosibirsk State University; Novosibirsk State Technical University

Email: simon@niic.nsc.ru
俄罗斯联邦, Novosibirsk, 630090; Novosibirsk, 630090; Novosibirsk, 630073

A. Chernikova

Moscow Institute of Physics and Technology

Email: simon@niic.nsc.ru
俄罗斯联邦, Dolgoprudnyi, Moscow oblast, 141700

A. Markeev

Moscow Institute of Physics and Technology

Email: simon@niic.nsc.ru
俄罗斯联邦, Dolgoprudnyi, Moscow oblast, 141700

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