Low-Temperature Crystallization of Germanium in the Thin-Film Ge/Al System
- Авторы: Beltiukov A.1, Volkov V.1, Chukavin A.1, Valeev R.1, Muslimov A.2, Kanevsky V.2
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Учреждения:
- Udmurt Federal Research Center, Russian Academy of Sciences, Ural Branch
- Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,” Russian Academy of Sciences
- Выпуск: Том 64, № 5 (2019)
- Страницы: 812-816
- Раздел: Surface and Thin Films
- URL: https://journals.rcsi.science/1063-7745/article/view/194241
- DOI: https://doi.org/10.1134/S1063774519050067
- ID: 194241
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Аннотация
The crystallization of thin germanium films during vacuum thermal deposition on an aluminum surface has been investigated. Significant changes in the morphology and crystal structure of films in dependence of the formation temperature are demonstrated using atomic force microscopy and X-ray diffraction. The temperature ranges for growth of amorphous and polycrystalline germanium films are determined. It is shown that the decrease in the germanium crystallization temperature to 300°С is caused by the size effect and is explained within the metal-induced crystallization model.
Об авторах
A. Beltiukov
Udmurt Federal Research Center, Russian Academy of Sciences, Ural Branch
Автор, ответственный за переписку.
Email: beltukov.a.n@gmail.com
Россия, Izhevsk, 426067
V. Volkov
Udmurt Federal Research Center, Russian Academy of Sciences, Ural Branch
Email: beltukov.a.n@gmail.com
Россия, Izhevsk, 426067
A. Chukavin
Udmurt Federal Research Center, Russian Academy of Sciences, Ural Branch
Email: beltukov.a.n@gmail.com
Россия, Izhevsk, 426067
R. Valeev
Udmurt Federal Research Center, Russian Academy of Sciences, Ural Branch
Email: beltukov.a.n@gmail.com
Россия, Izhevsk, 426067
A. Muslimov
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences
Email: beltukov.a.n@gmail.com
Россия, Moscow, 119333
V. Kanevsky
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences
Email: beltukov.a.n@gmail.com
Россия, Moscow, 119333