Study of Ion Beam Including Deposition Modes of Platinum Nanosized Structures Using by Focused Ion Beams
- 作者: Lisitsyn S.1, Kolomiytsev A.1, Il’in O.1, Il’ina M.1, Konoplev B.1, Bykov A.1, Ageev O.1
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隶属关系:
- Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
- 期: 卷 46, 编号 7 (2017)
- 页面: 468-473
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186631
- DOI: https://doi.org/10.1134/S106373971707006X
- ID: 186631
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详细
The results of experimental studies of the Pt structure with the thickness ranging from (0.48 ± 0.1) to (24.38 ± 0.1) nm ion beam including deposition by focused ion beam are presented. The rate of ion beam including deposition of Pt, which depending on the modes varies from (0.28 ± 0.02) to (6.7 ± 0.5) nm/s, is determined experimentally. The deviation of Pt lateral structure sizes from those preset by the template decreases from (29.3 ± 0.07)% to (2.4 ± 0.2)% depending on the deposition duration. By the thicknesses of Pt nanosized structures larger than 3 nm, their specific resistance amounts to (23.4 ± 1.8) Ohm cm and weakly depends on the thickness. The results can be used for developing the technological processes used to form the structures of microelectronics sensorics, nanoelectronics, and nano- and microsystem engineering.
作者简介
S. Lisitsyn
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
编辑信件的主要联系方式.
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog
A. Kolomiytsev
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog
O. Il’in
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog
M. Il’ina
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog
B. Konoplev
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog
A. Bykov
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog
O. Ageev
Institute of Nanotechnologies, Electronics and Electronic Equipment Engineering
Email: lisitsynsa@sfedu.ru
俄罗斯联邦, Taganrog