Measuring the sizes of microcircuit elements of widths less than 100 nm by the method of SEM probe defocusing
- 作者: Novikov Y.1,2
-
隶属关系:
- Prokhorov General Physics Institute
- National Research Nuclear University MEPHI
- 期: 卷 46, 编号 1 (2017)
- 页面: 55-65
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186219
- DOI: https://doi.org/10.1134/S1063739717010073
- ID: 186219
如何引用文章
详细
Using a virtual scanning electron microscope, the scanning electron microscope (SEM) method has been tested when measuring the sizes of microcircuit elements by means of the SEM probe defocusing method. The method is based on the choice of the points of SEM signals characterizing the features of their form, and determining the distance between these points depending on the focusing of the SEM probe. The extrapolation of the dependence to a zero size of the probe determines the width of the protrusions and trenches with the trapezoidal profiles at the level of the lower base of a trapezoid.
作者简介
Yu. Novikov
Prokhorov General Physics Institute; National Research Nuclear University MEPHI
编辑信件的主要联系方式.
Email: nya@kapella.gpi.ru
俄罗斯联邦, Moscow, 119991; Moscow, 115409