Influence of the annealing temperature on the ferroelectric properties of niobium-doped strontium–bismuth tantalate
- Авторы: Golosov D.1, Zavadski S.1, Kolos V.2, Turtsevich A.2, Okodzhi D.1
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Учреждения:
- Belarussian State University of Informatics and Radioelectronics
- JSC Interal
- Выпуск: Том 45, № 1 (2016)
- Страницы: 11-17
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/185496
- DOI: https://doi.org/10.1134/S1063739715060037
- ID: 185496
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Аннотация
Characteristics of ferroelectric thin films of niobium-doped strontium–bismuth tantalate (SBTN), which were deposited by magnetron sputtering on Pt/TiO2/SiO2/Si substrates, are investigated. To form the ferroelectric structure, deposited films were subjected to subsequent annealing at 700–800°C in an O2 atmosphere. The results of X-ray diffraction showed that the films immediately after the deposition have an amorphous structure. Annealing at 700–800°C results in the formation of the Aurivillius structure. The dependences of permittivity, residual polarization, and the coercitivity of SBTN films on the modes of subsequent annealing are established. Films with residual polarization 2Pr = 9.2 µC/cm2, coercitivity 2Ec = 157 kV/cm, and leakage current 10–6 A/cm2 are obtained at the annealing temperature of 800°C. The dielectric constant and loss tangent at frequency of 1.0 MHz were ε = 152 and tan δ = 0.06. The ferroelectric characteristics allow us to use the SBTN films in the capacitor cell of high density ferroelectric random-access non-volatile memory (FeRAM).
Об авторах
D. Golosov
Belarussian State University of Informatics and Radioelectronics
Автор, ответственный за переписку.
Email: dmgolosov@gmail.com
Белоруссия, st. Brovki 6, Minsk, 220013
S. Zavadski
Belarussian State University of Informatics and Radioelectronics
Email: dmgolosov@gmail.com
Белоруссия, st. Brovki 6, Minsk, 220013
V. Kolos
JSC Interal
Email: dmgolosov@gmail.com
Белоруссия, st. Kazintsa 121A, Minsk220108
A. Turtsevich
JSC Interal
Email: dmgolosov@gmail.com
Белоруссия, st. Kazintsa 121A, Minsk220108
D. Okodzhi
Belarussian State University of Informatics and Radioelectronics
Email: dmgolosov@gmail.com
Белоруссия, st. Brovki 6, Minsk, 220013