Two-view tomography of low-temperature plasma
- Authors: Fadeev A.V.1, Rudenko K.V.1,2
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Affiliations:
- Physics and Technology Institute
- Moscow Institute of Physics and Technology MIPT
- Issue: Vol 46, No 1 (2017)
- Pages: 30-38
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186210
- DOI: https://doi.org/10.1134/S1063739717010036
- ID: 186210
Cite item
Abstract
Emission tomography is a promising method for the diagnostics of thelateral uniformity of plasma components. However, the technological features of microelectronics allow one to use a strictly limited number of views, which adversely affects the quality of the reconstruction. The earlier proposed model of local inhomogeneities (MLI) allows one to resolve the diagnostic difficulties of the lateral homogeneity of the components of low-temperature plasma in the case of the two-view fan-like scanning scheme. In this work, the model is supplemented taking into account an additional factor affecting the accuracy of the tomographic reconstruction, namely, the dependence of the radiation intensity recorded by the optical angular sensor upon the distance to the radiating plasma particle. This was taken into account for the tomographic reconstruction using the method of the maximum entropy, which is basic for MLI.
About the authors
A. V. Fadeev
Physics and Technology Institute
Author for correspondence.
Email: AlexVFadeev@gmail.com
Russian Federation, Moscow, 117218
K. V. Rudenko
Physics and Technology Institute; Moscow Institute of Physics and Technology MIPT
Email: AlexVFadeev@gmail.com
Russian Federation, Moscow, 117218; Dolgoprudnyi, Moscow region, 141701