Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes
- Authors: Gromov D.G.1, Dubkov S.V.1, Pavlov A.A.2, Skorik S.N.3, Trifonov A.Y.4, Shulyatev A.S.1, Shaman Y.P.3, Rygalin B.N.1
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Affiliations:
- National Research University of Electronic Technology (MIET)
- Institute of Nanotechnologies of Microelectronics
- NPK Technological Center
- Federal State Unitary Enterprise Lukin Research Institute of Physical Problems
- Issue: Vol 45, No 2 (2016)
- Pages: 98-104
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/185559
- DOI: https://doi.org/10.1134/S1063739716020050
- ID: 185559
Cite item
Abstract
It is shown that multiwalled carbon nanotubes can be grown on the catalytic surface of a Co–Ti–N alloy with low (~10 at %) cobalt content by the conventional method of chemical deposition from acetylene. Adding nitrogen to the composition of the Co–Ti contributes the formation of the TiN compound and extrusion of Co onto the surface where it makes a catalytic effect for CNT growth. It was found that the tubes begin growth at a temperature of 400°C. It is shown by studies using Raman spectroscopy that the quality of CNT improves with increasing temperature.
About the authors
D. G. Gromov
National Research University of Electronic Technology (MIET)
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498
S. V. Dubkov
National Research University of Electronic Technology (MIET)
Author for correspondence.
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498
A. A. Pavlov
Institute of Nanotechnologies of Microelectronics
Email: sv.dubkov@gmail.com
Russian Federation, Moscow, 115487
S. N. Skorik
NPK Technological Center
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498
A. Yu. Trifonov
Federal State Unitary Enterprise Lukin Research Institute of Physical Problems
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124460
A. S. Shulyatev
National Research University of Electronic Technology (MIET)
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498
Yu. P. Shaman
NPK Technological Center
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498
B. N. Rygalin
National Research University of Electronic Technology (MIET)
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498