Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes


Cite item

Full Text

Open Access Open Access
Restricted Access Access granted
Restricted Access Subscription Access

Abstract

It is shown that multiwalled carbon nanotubes can be grown on the catalytic surface of a Co–Ti–N alloy with low (~10 at %) cobalt content by the conventional method of chemical deposition from acetylene. Adding nitrogen to the composition of the Co–Ti contributes the formation of the TiN compound and extrusion of Co onto the surface where it makes a catalytic effect for CNT growth. It was found that the tubes begin growth at a temperature of 400°C. It is shown by studies using Raman spectroscopy that the quality of CNT improves with increasing temperature.

About the authors

D. G. Gromov

National Research University of Electronic Technology (MIET)

Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498

S. V. Dubkov

National Research University of Electronic Technology (MIET)

Author for correspondence.
Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498

A. A. Pavlov

Institute of Nanotechnologies of Microelectronics

Email: sv.dubkov@gmail.com
Russian Federation, Moscow, 115487

S. N. Skorik

NPK Technological Center

Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498

A. Yu. Trifonov

Federal State Unitary Enterprise Lukin Research Institute of Physical Problems

Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124460

A. S. Shulyatev

National Research University of Electronic Technology (MIET)

Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498

Yu. P. Shaman

NPK Technological Center

Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498

B. N. Rygalin

National Research University of Electronic Technology (MIET)

Email: sv.dubkov@gmail.com
Russian Federation, Zelenograd, Moscow, 124498


Copyright (c) 2016 Pleiades Publishing, Ltd.

This website uses cookies

You consent to our cookies if you continue to use our website.

About Cookies