Interaction between Debris Particles and Polishing Powder Wear Particles in Polishing Optoelectronic Components

Resumo

The analysis of interaction between debris particles and polishing powder wear particles has demonstrated that the scattering of particles occurs through angles of 136.8° to 173.2°, and the effective differential scattering cross-section is 0.4 to 1.8 Tb. The trajectories of particles are rings located near the the workpiece surface within a zone whose thickness approximates the mean grain radius of the polishing powder.