Email this article Interaction between Debris Particles and Polishing Powder Wear Particles in Polishing Optoelectronic Components
- Authors: Filatov Y.D.1
-
Affiliations:
- Bakul Institute for Superhard Materials
- Issue: Vol 40, No 4 (2018)
- Pages: 282-289
- Section: Investigation of Machining Processes
- URL: https://journals.rcsi.science/1063-4576/article/view/186286
- DOI: https://doi.org/10.3103/S1063457618040081
- ID: 186286
Cite item
Open Access
Access granted
Subscription Access
Abstract
The analysis of interaction between debris particles and polishing powder wear particles has demonstrated that the scattering of particles occurs through angles of 136.8° to 173.2°, and the effective differential scattering cross-section is 0.4 to 1.8 Tb. The trajectories of particles are rings located near the the workpiece surface within a zone whose thickness approximates the mean grain radius of the polishing powder.
About the authors
Yu. D. Filatov
Bakul Institute for Superhard Materials
Author for correspondence.
Email: filatov@ism.kiev.ua
Ukraine, vul. Avtozavods’ka 2, Kiev, 04074
Supplementary files
