Evolution of Phase Composition and Structure in Sapphire Implanted with  64 Zn +  Ions and Heat-Treated in Oxygen

V. V. Privezentsev; O. S. Zilova; A. A. Burmistrov; A. A. Batrakov; M. Yu. Presnyakov

doi:10.3103/S1062873818020193

Evolution of Phase Composition and Structure in Sapphire Implanted with ⁶⁴Zn⁺ Ions and Heat-Treated in Oxygen

Authors: Privezentsev V.V.¹, Zilova O.S.², Burmistrov A.A.², Batrakov A.A.², Presnyakov M.Y.³
Affiliations:
1. Institute of Physics and Technology
2. National Research University “Moscow Power Engineering Institute” (MPEI)
3. National Research Center “Kurchatov Institute,”
Issue: Vol 82, No 2 (2018)
Pages: 163-169
Section: Article
URL: https://journals.rcsi.science/1062-8738/article/view/185303
DOI: https://doi.org/10.3103/S1062873818020193
ID: 185303

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Abstract

Single-crystal Al₂O₃ substrates are implanted with ⁶⁴Zn⁺ ions using doses of 5 × 10¹⁶ cm^–2 and an energy of 100 keV. The samples are annealed in oxygen with a stepwise increase in temperature from 400 to 1000°C. The changes on the surface and in the bulk of the sample are analyzed via scanning electron microscopy, energy-dispersive analysis, transmission electron microscopy, and Auger electron spectroscopy.