Evolution of Phase Composition and Structure in Sapphire Implanted with 64Zn+ Ions and Heat-Treated in Oxygen
- Autores: Privezentsev V.V.1, Zilova O.S.2, Burmistrov A.A.2, Batrakov A.A.2, Presnyakov M.Y.3
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Afiliações:
- Institute of Physics and Technology
- National Research University “Moscow Power Engineering Institute” (MPEI)
- National Research Center “Kurchatov Institute,”
- Edição: Volume 82, Nº 2 (2018)
- Páginas: 163-169
- Seção: Article
- URL: https://journals.rcsi.science/1062-8738/article/view/185303
- DOI: https://doi.org/10.3103/S1062873818020193
- ID: 185303
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Resumo
Single-crystal Al2O3 substrates are implanted with 64Zn+ ions using doses of 5 × 1016 cm–2 and an energy of 100 keV. The samples are annealed in oxygen with a stepwise increase in temperature from 400 to 1000°C. The changes on the surface and in the bulk of the sample are analyzed via scanning electron microscopy, energy-dispersive analysis, transmission electron microscopy, and Auger electron spectroscopy.
Sobre autores
V. Privezentsev
Institute of Physics and Technology
Autor responsável pela correspondência
Email: privezentsev@ftian.ru
Rússia, Moscow, 117218
O. Zilova
National Research University “Moscow Power Engineering Institute” (MPEI)
Email: privezentsev@ftian.ru
Rússia, Moscow, 111250
A. Burmistrov
National Research University “Moscow Power Engineering Institute” (MPEI)
Email: privezentsev@ftian.ru
Rússia, Moscow, 111250
A. Batrakov
National Research University “Moscow Power Engineering Institute” (MPEI)
Email: privezentsev@ftian.ru
Rússia, Moscow, 111250
M. Presnyakov
National Research Center “Kurchatov Institute,”
Email: privezentsev@ftian.ru
Rússia, Moscow, 123182
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