Evolution of Phase Composition and Structure in Sapphire Implanted with 64Zn+ Ions and Heat-Treated in Oxygen


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Resumo

Single-crystal Al2O3 substrates are implanted with 64Zn+ ions using doses of 5 × 1016 cm–2 and an energy of 100 keV. The samples are annealed in oxygen with a stepwise increase in temperature from 400 to 1000°C. The changes on the surface and in the bulk of the sample are analyzed via scanning electron microscopy, energy-dispersive analysis, transmission electron microscopy, and Auger electron spectroscopy.

Sobre autores

V. Privezentsev

Institute of Physics and Technology

Autor responsável pela correspondência
Email: privezentsev@ftian.ru
Rússia, Moscow, 117218

O. Zilova

National Research University “Moscow Power Engineering Institute” (MPEI)

Email: privezentsev@ftian.ru
Rússia, Moscow, 111250

A. Burmistrov

National Research University “Moscow Power Engineering Institute” (MPEI)

Email: privezentsev@ftian.ru
Rússia, Moscow, 111250

A. Batrakov

National Research University “Moscow Power Engineering Institute” (MPEI)

Email: privezentsev@ftian.ru
Rússia, Moscow, 111250

M. Presnyakov

National Research Center “Kurchatov Institute,”

Email: privezentsev@ftian.ru
Rússia, Moscow, 123182

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