Optimization of Material Analysis Conditions for Laser-Assisted Atom Probe Tomography Characterization

详细

Atom probe tomography (APT) analysis with a femtosecond laser is one of the most promising techniques to characterize local variations of chemical distribution in materials with subnanometer spatial resolution. In this study, the effect of APT analysis conditions on the accuracy of data recovery for chromium steels and Fe-Cr alloys is investigated. Dependences of mass resolving power and the detected composition of chromium as a function of laser power, specimen geometry, and evaporation rate are presented.