Peculiarities of gas chromatographic analysis of 6N4 volatile hydrides using a helium ionization detector operated in the ionization amplification mode

Abstract

A pneumovacuum circuit of a Tsvet-800-2 gas chromatograph with a helium ionization detector (HID) in the ionization amplification mode is proposed for controlling limiting trace impurities in ammonia, arsine, monosilane, and phosphine of grade 6N4. The conditions for the preparation and reliable operation of the chromatograph with the HID are systematized. The effect of an additive of (0.0–17.6) × 10^–4 mol % of hydrogen in the carrier gas of the detector on the polarity of its signal on the impurities of oxygen and nitrogen at a level of (0.5–20.0) × 10^–5 mol % is studied. Methods are proposed for eliminating systematic errors in the determination of the concentration of oxygen and nitrogen in the range from 0.5 × 10^–5 to 1 × 10^–3 mol % in 6N4 volatile hydrides, caused by “counter” impurities in the carrier gas, the mechanism of the heteropolar sensitivity of the HID, and irreversible chemical reactions of oxygen traces with phosphine and products of its decomposition on a CaA–ShM zeolite in a separating column of a chromatograph. Gas chromatography analysis of ammonia, arsine, monosilane, and phosphine of grade 6N4 was carried out.