A facility for measuring the thickness of thin metal films
- Авторлар: Tolipov K.1
-
Мекемелер:
- South Ural State University
- Шығарылым: Том 52, № 10 (2016)
- Беттер: 554-556
- Бөлім: Acoustic Methods
- URL: https://journals.rcsi.science/1061-8309/article/view/181192
- DOI: https://doi.org/10.1134/S1061830916100090
- ID: 181192
Дәйексөз келтіру
Аннотация
A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.
Негізгі сөздер
Авторлар туралы
Kh. Tolipov
South Ural State University
Хат алмасуға жауапты Автор.
Email: thb@susu.ac.ru
Ресей, Chelyabinsk, 454080