A facility for measuring the thickness of thin metal films
- 作者: Tolipov K.1
-
隶属关系:
- South Ural State University
- 期: 卷 52, 编号 10 (2016)
- 页面: 554-556
- 栏目: Acoustic Methods
- URL: https://journals.rcsi.science/1061-8309/article/view/181192
- DOI: https://doi.org/10.1134/S1061830916100090
- ID: 181192
如何引用文章
详细
A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.
作者简介
Kh. Tolipov
South Ural State University
编辑信件的主要联系方式.
Email: thb@susu.ac.ru
俄罗斯联邦, Chelyabinsk, 454080