Email this article A facility for measuring the thickness of thin metal films
- Authors: Tolipov K.B.1
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Affiliations:
- South Ural State University
- Issue: Vol 52, No 10 (2016)
- Pages: 554-556
- Section: Acoustic Methods
- URL: https://journals.rcsi.science/1061-8309/article/view/181192
- DOI: https://doi.org/10.1134/S1061830916100090
- ID: 181192
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Abstract
A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.
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About the authors
Kh. B. Tolipov
South Ural State University
Author for correspondence.
Email: thb@susu.ac.ru
Russian Federation, Chelyabinsk, 454080
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