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Interference Techniques for Measuring the surface Profile of Extended Samples
Akhsakhalyan A.D., Mikhailenko M.S., Pestov A.E., Petrakov E.V., Glushkov E.I., Chernyshev A.K., Chkhalo N.I.
Manufacturing of Atomically Smooth High-Precision Substrates for X-Ray Mirrors from Single Crystal Silicon by Chemical-Mechanical Polishing
Chkhalo N.I., Akhsakhalyan A.A., Zorina M.V., Malyshev I.V., Mikhailenko M.S., Belyaev S.N., Mal’shakova O.A.
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