Polymethyl Methacrylate with a Molecular Weight of 10 7  g/mol for X-Ray Lithography

V. P. Nazmov; Назьмов В. П.; A. V. Varand; Варанд А. В.; M. A. Mikhailenko; Михайленко М. А.; B. G. Goldenberg; Гольденберг Б. Г.; I. Yu. Prosanov; Просанов И. Ю.; K. B. Gerasimov; Герасимов К. Б.

doi:10.31857/S1028096023060110

Polymethyl Methacrylate with a Molecular Weight of 10⁷ g/mol for X-Ray Lithography

Authors: Nazmov V.P.¹^,2, Varand A.V.¹, Mikhailenko M.A.², Goldenberg B.G.¹^,3, Prosanov I.Y.², Gerasimov K.B.²
Affiliations:
1. Budker Institute of Nuclear Physics of SB RAS
2. Institute of Solid State Chemistry and Mechanochemistry of SB RAS
3. Shared-Use Center “SKIF”, Boreskov Institute of Catalysis of SB RAS
Issue: No 6 (2023)
Pages: 27-31
Section: Articles
URL: https://journals.rcsi.science/1028-0960/article/view/137764
DOI: https://doi.org/10.31857/S1028096023060110
EDN: https://elibrary.ru/DKCOQS
ID: 137764

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Abstract
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Abstract

The results of a study of syndiotactic polymethyl methacrylate with a molecular weight of 10⁷ g/mol, synthesized via ionic polymerization with radiation initiation, are presented. Changes in the chemical structure of the polymer material have been analyzed by IR spectroscopy, differential thermal analysis, and gel permeation chromatography. During thermal decomposition of the initial polymer, the mass loss process can be divided into three stages: low-temperature, medium-temperature, and high-temperature. The pronounced thermal effect of polymer melting disappears even after exposure to minimal doses of ionizing radiation. A relatively rapid decrease in the molecular weight under the influence of X-ray radiation in the dose range up to 100 J/cm³ and a scatter in molecular sizes have been found. Polydispersity at low doses is approximately 3.5 times higher than that at doses of the order of 10 kJ/cm³. A latent image development rate of approximately five times higher than that of a polymer with a molecular weight of 10⁶ g/mol under standard conditions was achieved. The contrast value was 3.4. Using X-ray synchrotron radiation at the VEPP-3 source, microstructuring was carried out by X-ray lithography. Microstructures up to 5 µm high and about 2 µm in diameter were obtained.

Keywords

polymethyl methacrylate, IR spectroscopy, gel permeation chromatography, differential thermal analysis, contrast, X-ray radiation, sensitivity, microstructures, X-ray lithography.

References

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