Formation of Intermetallic Compounds during the Ion-Plasma Sputtering of Metal Films on Diamond


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The morphology of the metal films deposited onto diamond by the ion-plasma method at a temperature of 600°С under vacuum (10–2 Pa) are studied by scanning electron microscopy. It is shown that crystalline formations and needle structures are formed on the surface of the films. It is established by X-ray phase analysis that NimTin compounds are mainly formed.

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Z. Berov

Berbekov Kabardino-Balkarian State University

Email: sozaeff@mail.ru
俄罗斯联邦, Nal’chik, Kabardino-Balkar Republic, 360004

V. Sozaev

North Caucasus Mining and Metallurgical Institute (State Technological University)

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Email: sozaeff@mail.ru
俄罗斯联邦, Vladikavkaz, Republic of North Ossetia-Alania, 362021

A. Manukyants

North Caucasus Mining and Metallurgical Institute (State Technological University)

Email: sozaeff@mail.ru
俄罗斯联邦, Vladikavkaz, Republic of North Ossetia-Alania, 362021

Yu. Kasumov

North Caucasus Mining and Metallurgical Institute (State Technological University)

Email: sozaeff@mail.ru
俄罗斯联邦, Vladikavkaz, Republic of North Ossetia-Alania, 362021

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