On controlling the surface curvature of diffraction components

V. V. Gribko; A. S. Markelov; V. N. Trushin; E. V. Chuprunov

doi:10.1134/S1027451017030077

On controlling the surface curvature of diffraction components

作者: Gribko V.V.¹, Markelov A.S.¹, Trushin V.N.¹, Chuprunov E.V.¹
隶属关系:
1. Lobachevsky State University of Nizhny Novgorod
期: 卷 11, 编号 3 (2017)
页面: 505-509
栏目: Article
URL: https://journals.rcsi.science/1027-4510/article/view/192945
DOI: https://doi.org/10.1134/S1027451017030077
ID: 192945

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详细

The possibility of interactively controlling the surface curvature of a single-crystal Si(100) plate used as a diffraction element is investigated. The initial component-surface profile is specified by the substrate shape, parameters of the adhesive, and the temperature of its adhesion to the substrate. The results of calculating the changes in surface profile and its curvature radius are presented.