The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface

M. V. Zorina; M. S. Mikhaylenko; D. E. Pariev; A. E. Pestov; N. N. Salashchenko; I. L. Strulya; S. A. Churin; N. I. Chkhalo

doi:10.1134/S102745101703017X

The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface

作者: Zorina M.V.¹, Mikhaylenko M.S.¹, Pariev D.E.¹, Pestov A.E.¹, Salashchenko N.N.¹, Strulya I.L.¹^,2, Churin S.A.¹^,3, Chkhalo N.I.¹
隶属关系:
1. Institute for Physics of Microstructures
2. OAO “Kompozit”
3. Lobachevsky State University of Nizhny Novgorod
期: 卷 11, 编号 3 (2017)
页面: 485-489
栏目: Article
URL: https://journals.rcsi.science/1027-4510/article/view/192922
DOI: https://doi.org/10.1134/S102745101703017X
ID: 192922

如何引用文章

全文:

开放存取

##reader.subscriptionAccessGranted##
受限制的访问

订阅存取

详细
作者简介
参考
补充文件
统计

详细

The effect of Ne ion beam etching on the roughness of materials for optical substrates—fused silica and beryllium—is studied. It is shown that the treatment of a fused silica surface by neutralized Ne ions with an energy of 400–800 eV makes it possible to smooth roughnessed in the range of higher spatial frequencies of 3–63 μm^–1 at an incidence angle of 0°–30°. For beryllium, the possibility of smoothing the surface roughness at an ion energy of 400 eV is found.