Using electron backscatter diffraction to investigate the influence of mechanical polishing on the state of the surface of diamond

Аннотация

Electron backscatter diffraction is used to determine the influence of mechanical polishing on the surface state of a two-layer structure made from diamond. It is found that the process of polishing does not lead to significant degradation of the surface, while the thickness of the amorphous layer formed due to polishing does not exceed a few atomic layers.