Study of Local Charge Accumulation in ZrO2(Y) Films with Au Nanoparticles by Kelvin Probe Force Microsсopy

Аннотация

The time dynamics of the spatial distribution of electrons locally injected from the probe of an atomic force microscope into thin (less than 10 nm) ZrO₂(Y) films with embedded Au nanoparticles on Si substrates is studied via Kelvin probe force microscopy. The profiles of the film surface potential induced by the injection of a countable number (several tens) of electrons into Au nanoparticles, as a function of the time elapsed after injection, are measured and analyzed.