Diagnostics of the Phase Composition of Lead-Zirconate-Titanate Films according to Raman Spectra: Phase Identification


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The problem concerning the diagnostics of the phase composition of lead-zirconate-titanate (PZT) films under conditions of overlapping Raman spectra is solved via applied mathematical statistics. The proposed phase-identification method based on reference spectra is implemented using different Raman-spectrum regions measured on the surface of multiphase PZT films. It is demonstrated that the identification of phases, as well as determination of their concentration, must be performed using the spectral range in which the calculated first principal components of the set of Raman spectra differ to the greatest extent from each other.

Sobre autores

V. Beshenkov

Institute of Microelectronics Technology and High Purity Materials

Autor responsável pela correspondência
Email: besh@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432

A. Znamenskii

Institute of Microelectronics Technology and High Purity Materials

Email: besh@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432

A. Irzhak

Institute of Microelectronics Technology and High Purity Materials

Email: besh@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432

V. Marchenko

Institute of Microelectronics Technology and High Purity Materials

Email: besh@iptm.ru
Rússia, Chernogolovka, Moscow oblast, 142432

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