Influence of surface corrugation on the sputtering of carbon materials under high-fluence ion bombardment


Citar

Texto integral

Acesso aberto Acesso aberto
Acesso é fechado Acesso está concedido
Acesso é fechado Somente assinantes

Resumo

The results of experimental and computer-based studies of the sputtering and erosion of carbonmaterial surfaces under high-fluence irradiation with 30-keV Ar+ ions at various angles of ion incidence are given. The irradiation of highly oriented pyrolytic graphite (HOPG) and polyacrylonitrile fibers of carbon–carbon composites, which are characterized by surface corrugation, is considered. A model is proposed for taking into account the influence of parameters of symmetric corrugation on the characteristics of sputtering of the irradiated materials. Calculation shows that taking experimental values of the corrugation slopes into account allows one to explain the angular dependence of the sputtering yield of HOPG. It is found that the pronounced (about two times) suppression of sputtering within the range of incidence angles of 60°–80° is connected with the rear (relative to the ion beam) faces of the corrugation being obscured. Unlike the case of the normal incidence of ions, the sputtering yield at large incidence angles decreases as the corrugation period increases due to blocking of the sputtering of the rear and neighboring faces of microrelief elements.

Sobre autores

N. Andrianova

MATI—Russian State Technological University

Email: es_mashkova@mail.ru
Rússia, Moscow

A. Borisov

MATI—Russian State Technological University

Email: es_mashkova@mail.ru
Rússia, Moscow

E. Mashkova

Skobel’tsyn Institute of Nuclear Physics

Autor responsável pela correspondência
Email: es_mashkova@mail.ru
Rússia, Moscow

V. Shulga

Skobel’tsyn Institute of Nuclear Physics

Email: es_mashkova@mail.ru
Rússia, Moscow

Arquivos suplementares

Arquivos suplementares
Ação
1. JATS XML

Declaração de direitos autorais © Pleiades Publishing, Ltd., 2016