Tungsten-Containing Phases in Diamond-Like Silicon−Carbon Nanocomposites

Abstract

Using scanning electron microscopy and X-ray photoelectron spectroscopy, we investigate the chemical forms of tungsten incorporated into diamond-like silicon–carbon films. The films are fabricated by simultaneously carrying out the plasmochemical decomposition of a silicon organic precursor and magnetron sputtering of the metal. Films of tungsten-containing diamond-like silicon–carbon nanocomposites are found to contain a considerable amount of the amorphous phase of tungsten oxide, along with nanocrystalline tungsten carbide.