Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode

V. V. Kazmiruk; I. G. Kurganov; N. N. Osipov; A. A. Podkopaev; T. N. Savitskaya

doi:10.1134/S1027451017020288

Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode

Authors: Kazmiruk V.V.¹, Kurganov I.G.¹, Osipov N.N.¹, Podkopaev A.A.¹, Savitskaya T.N.¹
Affiliations:
1. Institute of Microelectronics Technology and High Purity Materials
Issue: Vol 11, No 2 (2017)
Pages: 404-407
Section: Article
URL: https://journals.rcsi.science/1027-4510/article/view/192425
DOI: https://doi.org/10.1134/S1027451017020288
ID: 192425

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Abstract

A mathematical model of a SEM (scanning electron microscopy) signal formed by true secondary electrons, i.e., electrons emitted by a sample under the action of primary and inelastically scattered electrons, is proposed. Good agreement between the simulated signals and experimental results obtained on an Auriga (Carl Zeiss) device is attained.