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Vol 13, No 1 (2019)
Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors
Vainer Y.A., Garakhin S.A., Polkovnikov V.N., Salashchenko N.N., Svechnikov M.V., Chkhalo N.I., Yunin P.A.
PDF
(Eng)
Vol 12, No 5 (2018)
Study of the Influence of Implanted Atoms on the Coefficients of the Sputtering of Silicon and Silicon with a Thin Oxide Film
Tashmukhamedova D.A., Yusupjanova M.B., Tashatov A.K., Umirzakov B.E.
PDF
(Eng)
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