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Vol 13, No 4 (2019)
Optimization of the Electron Optical System of a Scanning Electron Microscope for Measuring the Size of Micro- and Nanoobjects
Kazmiruk V.V., Kurganov I.G., Podkopaev A.A., Savitskaya T.N.
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(Eng)
Vol 12, No 4 (2018)
Experience in the Development of a Configurable Laboratory UV Projection Photolithography System of Micron Resolution
Prokopovich P.A., Frolov D.N., Frolov V.N., Klement’ev E.S., Grunin A.I., Dikaya O.A., Koneva U.Y., Lyahov G.G., Efimov D.D., Serebrennikov D.A., Molchanov V.V., Severin E.A., Toropova O.V., Goikhman A.Y.
PDF
(Eng)
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