On Estimating the Heating of the Surface of a Homogeneous Metal Target with a Low-Energy Electron Probe

Abstract

Abstract—The problem of heat distribution in metal materials irradiated by finely focused low-energy electron beams in the absence of heat exchange between the target and the surrounding environment is studied using mathematical modeling methods. The model is based on solving a multidimensional stationary heat equation using Green’s function. The source function is a model applicable to a wide class of solids and primary-electron energy ranges, based on separation description of the absorbed and backscattered electron contributions to the energy dissipated in the target. The features of this approach explain the nonmonotonic dependence of the maximum heating temperature of the target on the primary-electron energy.