Extending the Measurement Capabilities of a Model 130 Profilometer

详细

The modification of a domestic series profilometer (model 130) is carried out. The device is additionally equipped with an easily mountable rod, on which a support ball is installed, displaced relative to the measuring needle by 30 mm. By moving the ball along the reference plane, it is possible to measure correctly both the micro- and the macroprofile (shape) of a surface along the needle path with a maximum length of 12.5 mm. Measurement results obtained using the initial and modified schemes are compared. It is shown that they coincide with a precision of 0.1 µm. Systematic errors and the accuracy of measurements for the initial and modified schemes of the device are determined. The results of measurements of the transverse profile of the etching grooves over a length of 12 mm are presented. The shape of the surface of a cylindrical X-ray mirror is measured over a length of 40 mm.