Calculation of Ion Reflection from Solids: Computer Simulation and Theory

Abstract

A computer program is developed to study ion reflection from solid surfaces. The program uses the cutoff Coulomb potential, the binary collision approximation, and the model of local inelastic energy losses. For a fixed ion-target combination, the reflection coefficient is calculated as a function of the ion energy and incidence angle. A reflection theory for the scattering cross section which depends on the transferred energy in accordance with the power law is constructed. Good agreement of the simulation results with the experiment and the theory is obtained.