Email this article Effect of High-Fluence Ion Irradiation on the Structure and Electrical Properties of Polycrystalline Diamond
- Authors: Anikin V.A.1, Borisov A.M.1, Kazakov V.A.1,2, Kudrin A.V.3, Mashkova E.S.4, Morkovkin A.I.4, Ovchinnikov M.A.1,4, Pitirimova E.A.3
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Affiliations:
- Moscow Aviation Institute (National Research University)
- Keldysh Research Center
- Lobachevsky State University of Nizhny Novgorod
- Skobeltsyn Institute of Nuclear Physics
- Issue: Vol 12, No 4 (2018)
- Pages: 801-806
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/195873
- DOI: https://doi.org/10.1134/S1027451018040237
- ID: 195873
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Abstract
The results of experimental investigation of the surface layer of polycrystalline diamond modified by high-fluence (≥1018 cm–2) 30-keV Ar+ ion irradiation are presented. The reflection high-energy electron diffraction (RHEED) patterns, Raman spectra, and temperature dependences of the electrical resistance are analyzed. It is found that depending on the irradiation conditions and temperature treatment of diamond a modified layer is formed with either a disorderd structure and semiconductor conductivity or the graphite structure and metallic conductivity.
About the authors
V. A. Anikin
Moscow Aviation Institute (National Research University)
Email: anatoly_borisov@mail.ru
Russian Federation, Moscow, 125993
A. M. Borisov
Moscow Aviation Institute (National Research University)
Author for correspondence.
Email: anatoly_borisov@mail.ru
Russian Federation, Moscow, 125993
V. A. Kazakov
Moscow Aviation Institute (National Research University); Keldysh Research Center
Email: anatoly_borisov@mail.ru
Russian Federation, Moscow, 125993; Moscow, 125438
A. V. Kudrin
Lobachevsky State University of Nizhny Novgorod
Email: anatoly_borisov@mail.ru
Russian Federation, Nizhny Novgorod, 603950
E. S. Mashkova
Skobeltsyn Institute of Nuclear Physics
Email: anatoly_borisov@mail.ru
Russian Federation, Moscow, 119991
A. I. Morkovkin
Skobeltsyn Institute of Nuclear Physics
Email: anatoly_borisov@mail.ru
Russian Federation, Moscow, 119991
M. A. Ovchinnikov
Moscow Aviation Institute (National Research University); Skobeltsyn Institute of Nuclear Physics
Email: anatoly_borisov@mail.ru
Russian Federation, Moscow, 125993; Moscow, 119991
E. A. Pitirimova
Lobachevsky State University of Nizhny Novgorod
Email: anatoly_borisov@mail.ru
Russian Federation, Nizhny Novgorod, 603950
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