Universal Function of Informative-Signal Generation for Quantitative Methods of Scanning Electron Microscopy

Abstract

A new universal function f(x, z) describing electron energy losses over depth ϕ(z) and the lateral distribution of electron energy losses ψ(x) in a scanning electron microscope is developed in the context of a multiple electron scattering model at energies of 1–50 keV in condensed matter, where two groups of backscattered primary electrons are taken into account for the first time.