On the Growth of High-Temperature Epitaxial AlN (AlGaN) Layers on Sapphire Substrates by Ammonia Molecular Beam Epitaxy

Abstract

The growth of high-temperature AlN and AlGaN layers on (0001) sapphire substrates by ammonia based molecular-beam epitaxy is studied. Factors affecting the formation of inverted domains in high-temperature AlN films are examined. The density of inverted domains is found to correlate with the density of nucleation islands during the initial stages of growth. The denser coverage of a surface by nucleation islands suppresses the formation of inverted domains. It is possible to increase the density of surface coating at the nucleation growth stage by increasing the degree of substrate nitriding, reducing the deposition temperature, and using intense ammonia fluxes during deposition of the initial layers. The kinetic model in the mean field approximation is developed to explain the observed effects of growth parameters on the density of nucleation islands. The growth features of AlN and its structure are taken into account. The obtained results are used to grow AlN/AlGaN layers with improved structural quality. The grown films have a root-mean-square surface roughness of 2 Å and 120 arc s FWHM of X-ray diffraction peaks for the AlN 0002 reflection. The density of inverted domains is decreased to below 10⁵ cm^-2. Improvement in the quality of the AlN films is achieved by using two-step growth and by the application of gallium as a surfactant.