Effect of recoil atoms on radiation-defect formation in semiconductors under 1–10-MeV proton irradiation

Abstract

The formation of radiation defects in Si under 1–10-MeV proton bombardment is analyzed. Numerical simulation is carried out, and histograms of the distribution of the energy transferred to recoil atoms are obtained. Two energy ranges are considered when analyzing the histograms. Single Frenkel pairs with closely located components are produced in the first range (small energies). Recoil atoms of the second range have an energy sufficient for the production of a displacement cascade. As a result, nanoscale regions with high densities of vacancies and different types of their complexes appear. In addition, as the energy of the primary knocked-out atoms increases, the average distance between genetically related Frenkel pairs increases, and, as a consequence, the fraction of pairs that are not recombined under bombardment increases.