Thermal Action of an Electronic Probe with X-ray Spectral Nanoanalysis
- Авторы: Amrastanov A.1, Kuzin A.2, Mityukhlyaev V.3, Seregina E.4, Stepovich M.1, Todua P.3, Filippov M.3,5
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Учреждения:
- Kaluga State University
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Kaluga Branch, Bauman Moscow State Technical University
- Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
- Выпуск: Том 60, № 6 (2017)
- Страницы: 534-537
- Раздел: Nanometrology
- URL: https://journals.rcsi.science/0543-1972/article/view/246184
- DOI: https://doi.org/10.1007/s11018-017-1230-3
- ID: 246184
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Аннотация
An algorithm for estimating the temperature of local heating with an electron-probe low-voltage nanoanalysis is proposed. The approximation of the electron energy loss function in a solid is used. Expressions were obtained for calculating the temperature distribution in a sample irradiated by a focused electron beam.
Об авторах
A. Amrastanov
Kaluga State University
Email: mn@filippov.org.ru
Россия, Kaluga
A. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: mn@filippov.org.ru
Россия, Moscow
V. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: mn@filippov.org.ru
Россия, Moscow
E. Seregina
Kaluga Branch, Bauman Moscow State Technical University
Email: mn@filippov.org.ru
Россия, Kaluga
M. Stepovich
Kaluga State University
Email: mn@filippov.org.ru
Россия, Kaluga
P. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: mn@filippov.org.ru
Россия, Moscow
M. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
Автор, ответственный за переписку.
Email: mn@filippov.org.ru
Россия, Moscow; Moscow