Email this article Thermal Action of an Electronic Probe with X-ray Spectral Nanoanalysis
- Authors: Amrastanov A.N.1, Kuzin A.Y.2, Mityukhlyaev V.B.3, Seregina E.V.4, Stepovich M.A.1, Todua P.A.3, Filippov M.N.3,5
-
Affiliations:
- Kaluga State University
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Kaluga Branch, Bauman Moscow State Technical University
- Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
- Issue: Vol 60, No 6 (2017)
- Pages: 534-537
- Section: Nanometrology
- URL: https://journals.rcsi.science/0543-1972/article/view/246184
- DOI: https://doi.org/10.1007/s11018-017-1230-3
- ID: 246184
Cite item
Open Access
Access granted
Subscription Access
Abstract
An algorithm for estimating the temperature of local heating with an electron-probe low-voltage nanoanalysis is proposed. The approximation of the electron energy loss function in a solid is used. Expressions were obtained for calculating the temperature distribution in a sample irradiated by a focused electron beam.
About the authors
A. N. Amrastanov
Kaluga State University
Email: mn@filippov.org.ru
Russian Federation, Kaluga
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: mn@filippov.org.ru
Russian Federation, Moscow
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: mn@filippov.org.ru
Russian Federation, Moscow
E. V. Seregina
Kaluga Branch, Bauman Moscow State Technical University
Email: mn@filippov.org.ru
Russian Federation, Kaluga
M. A. Stepovich
Kaluga State University
Email: mn@filippov.org.ru
Russian Federation, Kaluga
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: mn@filippov.org.ru
Russian Federation, Moscow
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
Author for correspondence.
Email: mn@filippov.org.ru
Russian Federation, Moscow; Moscow
