Enviar artigo por via de e-mail Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm
- Autores: Efimenkov Y.R.1, Zolotarevskii Y.M.1, Lyaskovskii V.L.1, Min’kov K.N.1, Samoilenko A.A.1
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Afiliações:
- All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
- Edição: Volume 58, Nº 11 (2016)
- Páginas: 1214-1215
- Seção: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/245551
- DOI: https://doi.org/10.1007/s11018-016-0872-x
- ID: 245551
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Resumo
Results from the development of an experimental sample of a measure with relief elements less than 100 nm for use in calibration of optical, near-field, and electron microscopes based on a metallized electronic resist (coating) are presented.
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Sobre autores
Yu. Efimenkov
All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
Email: izmt@vniims.ru
Rússia, Moscow
Yu. Zolotarevskii
All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
Email: izmt@vniims.ru
Rússia, Moscow
V. Lyaskovskii
All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
Email: izmt@vniims.ru
Rússia, Moscow
K. Min’kov
All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
Email: izmt@vniims.ru
Rússia, Moscow
A. Samoilenko
All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
Email: izmt@vniims.ru
Rússia, Moscow
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