Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm

Yu. R. Efimenkov; Yu. M. Zolotarevskii; V. L. Lyaskovskii; K. N. Min’kov; A. A. Samoilenko

doi:10.1007/s11018-016-0872-x

Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm

Authors: Efimenkov Y.R.¹, Zolotarevskii Y.M.¹, Lyaskovskii V.L.¹, Min’kov K.N.¹, Samoilenko A.A.¹
Affiliations:
1. All-Russia Research Institute of Optophysical Measurements (VNIIOFI)
Issue: Vol 58, No 11 (2016)
Pages: 1214-1215
Section: Article
URL: https://journals.rcsi.science/0543-1972/article/view/245551
DOI: https://doi.org/10.1007/s11018-016-0872-x
ID: 245551

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Abstract

Results from the development of an experimental sample of a measure with relief elements less than 100 nm for use in calibration of optical, near-field, and electron microscopes based on a metallized electronic resist (coating) are presented.

Keywords

relief measure, calibration, near-field microscopy, optical microscopy, electron microscopy